Mikko Ritala

Person

Latest publications

  1. Patterned films by atomic layer deposition using Parafilm as a mask

    Zhang, C., Kalliomäki, J., Leskelä, M. & Ritala, M. Jan 2018 In : Journal of vacuum science & technology : an official journal of the American Vacuum Society. 36, 1, 5 p., ARTN 01B102

    Research output: Contribution to journalArticle

  2. Atomic Layer Deposition of Zirconium Dioxide from Zirconium Tetraiodide and Ozone

    Kukli, K., Kemell, M., Mizohata, K., Vehkamäki, M., Kalam, K., Castan, H., Duenas, S., Link, J., Stern, R., Ritala, M. & Leskelä, M. 2018 In : ECS Journal of Solid State Science and Technology. 7, 2, p. P1-P8 8 p.

    Research output: Contribution to journalArticle

  3. Metal oxide multilayer hard mask system for 3D nanofabrication

    Han, Z., Vehkamäki, M., Salmi, E., Leskelä, M. & Ritala, M. 2018 In : Nanotechnology. 29, 5, 8 p., 055301

    Research output: Contribution to journalArticle

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Latest activities

  1. ALD for Industry - 2nd Workshop and Tutorial

    Ritala, M. (Speaker: Presenter)
    21 Mar 201822 Mar 2018

    Activity: Participating in or organising an eventOrganisation and participation in conferences, workshops, courses, seminars

  2. 2017 China Finland Young Scientist Forum

    Ritala, M. (Speaker: Presenter)
    15 Dec 2017

    Activity: Participating in or organising an eventOrganisation and participation in conferences, workshops, courses, seminars

  3. Opponent of PhD thesis

    Ritala, M. (Opponent)
    20 Nov 2017

    Activity: ExaminationOpponent of doctoral dissertation

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Latest prizes

  1. Award - Alfred Kordelin foundation

    Mikko Ritala (Recipient), 6 Nov 2010

    Prize: Prizes and awards

View all (1) »

Latest projects

  1. NanoFib

    Koivula, R., Meriläinen, S., Paajanen, J., Santala, E., Harjula, R. & Ritala, M.

    01/09/201531/12/2018

    Project: Research projectOther business activities

  2. Epäorgaanis-orgaanisten hybridimateriaaliohutkalvo

    Ritala, M. & Salmi, L.

    Unknown funder

    01/01/200831/12/2011

    Project: Research project

View all (2) »

Education

Fil. toht., muu tai tuntematon luonnontieteellinen

ID: 27523