Timo Pekka Sajavaara

Person

Latest publications

  1. Recommended reading list of early publications on atomic layer deposition-Outcome of the "Virtual Project on the History of ALD"

    Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D. C., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D. M., Hwang, C. S., Jen, S-H., Kallio, T., Kanervo, J. & 42 othersKhmelnitskiy, I., Kim, D. H., Klibanov, L., Koshtyal, Y., Krause, A. O. I., Kuhs, J., Kaerkkaenen, I., Kaariainen, M-L., Kääriäinen, T., Lamagna, L., Lapicki, A. A., Leskelä, M., Lipsanen, H., Lyytinen, J., Malkov, A., Malygin, A., Mennad, A., Militzer, C., Molarius, J., Norek, M., Ozgit-Akgun, C., Panov, M., Pedersen, H., Piallat, F., Popov, G., Puurunen, R. L., Rampelberg, G., Ras, R. H. A., Rauwel, E., Roozeboom, F., Sajavaara, T., Salami, H., Savin, H., Schneider, N., Seidel, T. E., Sundqvist, J., Suyatin, D. B., Torndahl, T., van Ommen, J. R., Wiemer, C., Ylivaara, O. M. E. & Yurkevich, O., 2017, In : Journal of Vacuum Science Technology A: Vacuum, Surfaces, and Films. 35, 1, 13 p., 010801.

    Research output: Contribution to journalReview ArticleScientificpeer-review

  2. Studies on Atomic Layer Deposition of IRMOF-8 Thin Films

    Salmi, L., Heikkilä, M., Vehkamäki, M., Puukilainen, E., Sajavaara, T. P. & Ritala, M., Jan 2015, In : Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films. 33, 1, p. 01A121-1 - 01A121-8 8 p., ARTN 01A121.

    Research output: Contribution to journalArticleScientificpeer-review

  3. Atomic layer deposition of LixTiyOz thin films

    Miikkulainen, V., Nilsen, O., Laitinen, M., Sajavaara, T. & Fjellvag, H., 2013, In : RSC Advances. 3, 20, p. 7537-7542 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

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